{"id":15833,"date":"2024-01-17T19:20:52","date_gmt":"2024-01-17T19:20:52","guid":{"rendered":"https:\/\/liquidinstruments.com\/?p=15833"},"modified":"2025-07-08T18:46:06","modified_gmt":"2025-07-08T18:46:06","slug":"mems-characterization-101","status":"publish","type":"post","link":"https:\/\/liquidinstruments.com\/blog\/mems-characterization-101\/","title":{"rendered":"MEMS characterization 101: Everything you need to know","gt_translate_keys":[{"key":"rendered","format":"text"}]},"content":{"rendered":"<p><span style=\"font-weight: 400;\">Everywhere you look, it\u2019s obvious: Devices today are getting smaller. What you may not realize is how small they\u2019re truly becoming. <\/span><\/p>\n<p><span style=\"font-weight: 400;\">Enter microelectromechanical systems (MEMS). MEMS are tiny devices or systems with both electrical and mechanical components. These systems range from a few micrometers to a few millimeters in size. At these scales, there is little room for error, which makes MEMS characterization and testing one of the most important steps in the design process of such systems. Let\u2019s break MEMS down a bit more:<\/span><\/p>\n<ul>\n<li style=\"font-weight: 400;\"><span style=\"font-weight: 400;\">Micro: These devices are on the microscale.<\/span><\/li>\n<li style=\"font-weight: 400;\"><span style=\"font-weight: 400;\">Electro: These devices contain electrical components like sensors.<\/span><\/li>\n<li style=\"font-weight: 400;\"><span style=\"font-weight: 400;\">Mechanical: These devices contain mechanical components like actuators.<sup>1<\/sup><\/span><\/li>\n<\/ul>\n<h2><span style=\"font-weight: 400;\">How to perform MEMS characterization<\/span><\/h2>\n<p><span style=\"font-weight: 400;\">It\u2019s difficult to get any two MEMS devices to behave the same way. The devices are challenging to test due to their size, and performance inconsistencies are common. This reality can make figuring out what tests to run and how to run them daunting. To fully test your MEMS device, you\u2019ll need to assess performance, reliability, and functionality. Let\u2019s go over a few instruments you\u2019ll need to get started, and several tests to consider when performing MEMS characterization.<\/span><\/p>\n<h3><span style=\"font-weight: 400;\">Equipment needed for MEMs characterization<\/span><\/h3>\n<ul>\n<li style=\"font-weight: 400;\"><a href=\"https:\/\/liquidinstruments.com\/products\/integrated-instruments\/arbitrary-waveform-generator\/\" rel=\"noopener\"><span style=\"font-weight: 400;\">Arbitrary Waveform Generator<\/span><\/a><span style=\"font-weight: 400;\"> and <\/span><a href=\"https:\/\/liquidinstruments.com\/products\/integrated-instruments\/waveform-generator\/\" rel=\"noopener\"><span style=\"font-weight: 400;\">Waveform Generator<\/span><\/a><span style=\"font-weight: 400;\"> to generate an input signal with respect to the device under test (DUT)<\/span><\/li>\n<li style=\"font-weight: 400;\"><a href=\"https:\/\/liquidinstruments.com\/products\/integrated-instruments\/oscilloscope\/\" rel=\"noopener\"><span style=\"font-weight: 400;\">Oscilloscope<\/span><\/a><span style=\"font-weight: 400;\"> and <\/span><a href=\"https:\/\/liquidinstruments.com\/products\/integrated-instruments\/spectrum-analyzer\/\" rel=\"noopener\"><span style=\"font-weight: 400;\">Spectrum Analyzer<\/span><\/a><span style=\"font-weight: 400;\"> to measure the output of the DUT in the time and frequency domains<\/span><\/li>\n<li style=\"font-weight: 400;\"><a href=\"https:\/\/liquidinstruments.com\/products\/integrated-instruments\/lock-in-amplifier\/\" rel=\"noopener\"><span style=\"font-weight: 400;\">Lock-in Amplifier<\/span><\/a><span style=\"font-weight: 400;\"> to extract signal information if the device has a poor SNR, or signal-to-noise ratio (Figure 1)<\/span><\/li>\n<li style=\"font-weight: 400;\"><a href=\"https:\/\/liquidinstruments.com\/products\/integrated-instruments\/frequency-response-analyzer\/\" rel=\"noopener\"><span style=\"font-weight: 400;\">Frequency Response Analyzer<\/span><\/a><span style=\"font-weight: 400;\"> for frequency response analysis<\/span><\/li>\n<li style=\"font-weight: 400;\"><a href=\"https:\/\/liquidinstruments.com\/products\/integrated-instruments\/digital-filter-box\/\" rel=\"noopener\"><span style=\"font-weight: 400;\">Digital Filter Box<\/span><\/a><span style=\"font-weight: 400;\"> for filtering excess noise\/signal preemphasis&nbsp;<\/span><\/li>\n<li style=\"font-weight: 400;\"><a href=\"https:\/\/liquidinstruments.com\/products\/integrated-instruments\/pid-controller\/\" rel=\"noopener\"><span style=\"font-weight: 400;\">PID Controller<\/span><\/a><span style=\"font-weight: 400;\"> for feedback control and stability<\/span><\/li>\n<\/ul>\n<p><img decoding=\"async\" class=\"alignnone wp-image-16593 size-full aligncenter\" src=\"https:\/\/liquidinstruments.com\/wp-content\/uploads\/2024\/02\/Moku-Lock-in-Amplifier-in-an-optics-lab.png\" alt=\"Moku Lock-in Amplifier in an optics lab\" width=\"600\" height=\"300\" srcset=\"https:\/\/liquidinstruments.com\/wp-content\/uploads\/2024\/02\/Moku-Lock-in-Amplifier-in-an-optics-lab.png 600w, https:\/\/liquidinstruments.com\/wp-content\/uploads\/2024\/02\/Moku-Lock-in-Amplifier-in-an-optics-lab-300x150.png 300w\" sizes=\"(max-width: 600px) 100vw, 600px\" \/><\/p>\n<p style=\"text-align: center;\">Figure 1: Use the FPGA-based Moku Lock-in Amplifier for fast, flexible extraction of critical signal information if your MEMS device has a poor SNR.<\/p>\n<h3><span style=\"font-weight: 400;\">Tests to run<\/span><\/h3>\n<h4><strong>Response time: Measure how quickly the device can react to changes in the environment<\/strong><\/h4>\n<p><span style=\"font-weight: 400;\">Instruments needed: <\/span><a href=\"https:\/\/liquidinstruments.com\/products\/integrated-instruments\/waveform-generator\/\" rel=\"noopener\"><span style=\"font-weight: 400;\">Waveform Generator<\/span><\/a><span style=\"font-weight: 400;\">, <\/span><a href=\"https:\/\/liquidinstruments.com\/products\/integrated-instruments\/oscilloscope\/\" rel=\"noopener\"><span style=\"font-weight: 400;\">Oscilloscope<\/span><\/a><\/p>\n<ol>\n<li style=\"font-weight: 400;\"><span style=\"font-weight: 400;\">Establish the device baseline output without changing the input.<\/span><\/li>\n<li style=\"font-weight: 400;\"><span style=\"font-weight: 400;\">Apply a step input signal to the DUT.<\/span>\n<ul>\n<li style=\"font-weight: 400;\"><span style=\"font-weight: 400;\">Note: The type of signal depends on the type of DUT. Feel free to use a different signal.<\/span><\/li>\n<\/ul>\n<\/li>\n<li style=\"font-weight: 400;\"><span style=\"font-weight: 400;\">Record the response of the device until it reaches a steady-state.<\/span><\/li>\n<li style=\"font-weight: 400;\"><span style=\"font-weight: 400;\">Measure the time it took the device to transition from the baseline state to the response from the step input, or 10-90% of the final value.<\/span><\/li>\n<li style=\"font-weight: 400;\"><span style=\"font-weight: 400;\">Repeat this measurement under different operating conditions.<\/span><\/li>\n<\/ol>\n<h4><strong>Frequency response: Measure how the device behaves at different frequencies<\/strong><\/h4>\n<p><span style=\"font-weight: 400;\">Instruments needed: <\/span><a href=\"https:\/\/liquidinstruments.com\/products\/integrated-instruments\/frequency-response-analyzer\/\" rel=\"noopener\"><span style=\"font-weight: 400;\">Frequency Response Analyzer<\/span><\/a><span style=\"font-weight: 400;\">, <\/span><a href=\"https:\/\/liquidinstruments.com\/products\/integrated-instruments\/digital-filter-box\/\" rel=\"noopener\"><span style=\"font-weight: 400;\">Digital Filter Box<\/span><\/a><\/p>\n<ol>\n<li style=\"font-weight: 400;\"><span style=\"font-weight: 400;\">Set up a <\/span><a href=\"https:\/\/liquidinstruments.com\/multi-instrument-mode\/\" rel=\"noopener\"><span style=\"font-weight: 400;\">Multi-instrument Mode<\/span><\/a><span style=\"font-weight: 400;\"> configuration with a Digital Filter Box (for filtering and amplification) and Frequency Response Analyzer.<\/span><\/li>\n<li style=\"font-weight: 400;\"><span style=\"font-weight: 400;\">Perform a frequency sweep to measure the amplitude of the MEMs device\u2019s response at each frequency. Look at the phase shift introduced by the device at different frequencies.<\/span><\/li>\n<li style=\"font-weight: 400;\"><span style=\"font-weight: 400;\">Identify the resonance frequency, where the MEMS device exhibits the highest response.<\/span><\/li>\n<li style=\"font-weight: 400;\"><span style=\"font-weight: 400;\">Calculate the 3 dB cutoff frequency\/bandwidth of the device to identify the operating range of the device.<\/span><\/li>\n<li style=\"font-weight: 400;\"><span style=\"font-weight: 400;\">Check for distortion and nonlinearities.<\/span><\/li>\n<li style=\"font-weight: 400;\"><span style=\"font-weight: 400;\">Perform this test under different environmental and temperature conditions.<\/span><\/li>\n<\/ol>\n<h4><strong>Calibrating your MEMS device<\/strong><\/h4>\n<p><span style=\"font-weight: 400;\">Instruments needed: <\/span><a href=\"https:\/\/liquidinstruments.com\/products\/integrated-instruments\/waveform-generator\/\" rel=\"noopener\"><span style=\"font-weight: 400;\">Waveform Generator<\/span><\/a><span style=\"font-weight: 400;\">, <\/span><a href=\"https:\/\/liquidinstruments.com\/products\/integrated-instruments\/data-logger\/\" rel=\"noopener\"><span style=\"font-weight: 400;\">Data Logger<\/span><\/a><span style=\"font-weight: 400;\">, <\/span><a href=\"https:\/\/liquidinstruments.com\/products\/integrated-instruments\/oscilloscope\/\" rel=\"noopener\"><span style=\"font-weight: 400;\">Oscilloscope<\/span><\/a><span style=\"font-weight: 400;\"> or <\/span><a href=\"https:\/\/liquidinstruments.com\/products\/integrated-instruments\/spectrum-analyzer\/\" rel=\"noopener\"><span style=\"font-weight: 400;\">Spectrum Analyzer<\/span><\/a><\/p>\n<ol>\n<li style=\"font-weight: 400;\"><span style=\"font-weight: 400;\">Use a trusted, stable source to generate a known signal.<\/span><\/li>\n<li style=\"font-weight: 400;\"><span style=\"font-weight: 400;\">Measure the response of the DUT to the known signal.<\/span><\/li>\n<li style=\"font-weight: 400;\"><span style=\"font-weight: 400;\">Record the results using a Data Logger.<\/span><\/li>\n<li style=\"font-weight: 400;\"><span style=\"font-weight: 400;\">Establish a relationship between the input and output, or a calibration curve.<\/span><\/li>\n<li style=\"font-weight: 400;\"><span style=\"font-weight: 400;\">Determine correction coefficients based on this curve. Apply these to the DUT and repeat measurements.<\/span><\/li>\n<\/ol>\n<h4><strong>Measure noise: Analyze how well the DUT can maintain a strong signal relative to the noise level<\/strong><\/h4>\n<p><span style=\"font-weight: 400;\">Instruments needed: <\/span><a href=\"https:\/\/liquidinstruments.com\/products\/integrated-instruments\/arbitrary-waveform-generator\/\" rel=\"noopener\"><span style=\"font-weight: 400;\">Arbitrary Waveform Generator<\/span><\/a><span style=\"font-weight: 400;\"> or <\/span><a href=\"https:\/\/liquidinstruments.com\/products\/integrated-instruments\/waveform-generator\/\" rel=\"noopener\"><span style=\"font-weight: 400;\">Waveform Generator<\/span><\/a><span style=\"font-weight: 400;\">, <\/span><a href=\"https:\/\/liquidinstruments.com\/products\/integrated-instruments\/spectrum-analyzer\/\" rel=\"noopener\"><span style=\"font-weight: 400;\">Spectrum Analyzer<\/span><\/a><span style=\"font-weight: 400;\">, <\/span><a href=\"https:\/\/liquidinstruments.com\/products\/integrated-instruments\/oscilloscope\/\" rel=\"noopener\"><span style=\"font-weight: 400;\">Oscilloscope<\/span><\/a><\/p>\n<ol>\n<li style=\"font-weight: 400;\"><span style=\"font-weight: 400;\">Record baseline noise floor with no input signal.<\/span><\/li>\n<li style=\"font-weight: 400;\"><span style=\"font-weight: 400;\">Apply a known, stable input signal.<\/span><\/li>\n<li style=\"font-weight: 400;\"><span style=\"font-weight: 400;\">View the result on the Spectrum Analyzer.<\/span>\n<ol>\n<li style=\"font-weight: 400;\"><span style=\"font-weight: 400;\">Measure amplitude of signal and any interference\/noise.<\/span><\/li>\n<li style=\"font-weight: 400;\"><span style=\"font-weight: 400;\">Measure the noise power background in a frequency band far from the signal.<\/span><\/li>\n<li style=\"font-weight: 400;\"><span style=\"font-weight: 400;\">Calculate SNR in dB with <img decoding=\"async\" class=\"wp-image-15837 alignnone\" src=\"https:\/\/liquidinstruments.com\/wp-content\/uploads\/2024\/01\/Screenshot-2024-01-17-at-11.18.20-AM.png\" alt=\"SNR formula MEMs characterization\" width=\"177\" height=\"24\" srcset=\"https:\/\/liquidinstruments.com\/wp-content\/uploads\/2024\/01\/Screenshot-2024-01-17-at-11.18.20-AM.png 414w, https:\/\/liquidinstruments.com\/wp-content\/uploads\/2024\/01\/Screenshot-2024-01-17-at-11.18.20-AM-300x41.png 300w\" sizes=\"(max-width: 177px) 100vw, 177px\" \/>, signal power&nbsp;and noise power are in units of power such as watts (W).<br \/>\n<\/span><\/li>\n<\/ol>\n<\/li>\n<\/ol>\n<h4><strong>Measure mean time between failures (MTBF) to measure device reliability<\/strong><\/h4>\n<p><span style=\"font-weight: 400;\">Instruments needed: <\/span><a href=\"https:\/\/liquidinstruments.com\/products\/integrated-instruments\/data-logger\/\" rel=\"noopener\"><span style=\"font-weight: 400;\">Data Logger<\/span><\/a><span style=\"font-weight: 400;\">, <\/span><a href=\"https:\/\/liquidinstruments.com\/products\/integrated-instruments\/spectrum-analyzer\/\" rel=\"noopener\"><span style=\"font-weight: 400;\">Spectrum Analyzer<\/span><\/a><span style=\"font-weight: 400;\">, <\/span><a href=\"https:\/\/liquidinstruments.com\/products\/integrated-instruments\/oscilloscope\/\" rel=\"noopener\"><span style=\"font-weight: 400;\">Oscilloscope<\/span><\/a><\/p>\n<ol>\n<li style=\"font-weight: 400;\"><span style=\"font-weight: 400;\">Define what the failure events include: hardware failures or software failures?<\/span><\/li>\n<li style=\"font-weight: 400;\"><span style=\"font-weight: 400;\">Operate the device over a defined period of time and record the number of failures.<\/span><\/li>\n<li style=\"font-weight: 400;\"><span style=\"font-weight: 400;\">Calculate the MTBF for each type of failure: <\/span><span style=\"font-weight: 400;\"> <img decoding=\"async\" class=\" wp-image-15838 alignnone\" src=\"https:\/\/liquidinstruments.com\/wp-content\/uploads\/2024\/01\/Screenshot-2024-01-17-at-11.19.10-AM.png\" alt=\"MBTF MEMs characterization\" width=\"160\" height=\"29\" srcset=\"https:\/\/liquidinstruments.com\/wp-content\/uploads\/2024\/01\/Screenshot-2024-01-17-at-11.19.10-AM.png 374w, https:\/\/liquidinstruments.com\/wp-content\/uploads\/2024\/01\/Screenshot-2024-01-17-at-11.19.10-AM-300x55.png 300w\" sizes=\"(max-width: 160px) 100vw, 160px\" \/><\/span><\/li>\n<li style=\"font-weight: 400;\"><span style=\"font-weight: 400;\">Keep an eye on the failure rate over time for the most meaningful data.<\/span><\/li>\n<\/ol>\n<p>&nbsp;<\/p>\n<h2><span style=\"font-weight: 400;\">Examples of MEMS devices<\/span><\/h2>\n<h4><span style=\"font-weight: 400;\">MEMS devices are important in a range of applications, from actuators to automotive.<\/span><\/h4>\n<h4><strong>Sensors<\/strong><\/h4>\n<ul>\n<li style=\"font-weight: 400;\"><span style=\"font-weight: 400;\">Accelerometers that detect motion in smartphones<\/span><\/li>\n<li style=\"font-weight: 400;\"><span style=\"font-weight: 400;\">Gyroscopes that detect rotation in cameras for image stabilization<\/span><\/li>\n<\/ul>\n<h4><strong>Actuators<\/strong><\/h4>\n<ul>\n<li style=\"font-weight: 400;\"><span style=\"font-weight: 400;\">Small valves that respond to electrical stimulation with movement, such as in microfluidics<\/span><\/li>\n<li style=\"font-weight: 400;\"><span style=\"font-weight: 400;\">Piezoelectric actuators used in autofocus in cameras, precision positioning systems, and even inkjet printer nozzles<\/span><\/li>\n<\/ul>\n<h4><strong>Optics<\/strong><\/h4>\n<ul>\n<li style=\"font-weight: 400;\"><span style=\"font-weight: 400;\">Optical MEMs devices like micro-mirrors and micro-lenses in optical switches and adaptive optics, including micro-electrothermal actuators (META)&nbsp;<\/span><\/li>\n<li style=\"font-weight: 400;\"><span style=\"font-weight: 400;\">Variable optical attenuators (VOAs) to adjust the intensity of light signals in fiber-optic communications<\/span><\/li>\n<li style=\"font-weight: 400;\"><span style=\"font-weight: 400;\">MEMs-based beam steering to control the direction of a laser beam in LiDAR or free-space optical communications (FSOC)<\/span><\/li>\n<\/ul>\n<h4><strong>Biotechnology<sup>2<\/sup><\/strong><\/h4>\n<ul>\n<li style=\"font-weight: 400;\"><span style=\"font-weight: 400;\">Microneedle arrays for minimally invasive drug delivery and biosensing<\/span><\/li>\n<li style=\"font-weight: 400;\"><span style=\"font-weight: 400;\">Pressure sensing such as MEMS-based blood pressure monitors<\/span><\/li>\n<li style=\"font-weight: 400;\"><span style=\"font-weight: 400;\">Micro-optical coherence tomography (\u00b5OCT) that provide high-resolution, cross-sectional imaging of biological tissues<\/span><\/li>\n<\/ul>\n<h4><strong>Automotive<sup>3<\/sup><\/strong><\/h4>\n<ul>\n<li style=\"font-weight: 400;\"><span style=\"font-weight: 400;\">Accelerometers that measure changes in speed<\/span><\/li>\n<li style=\"font-weight: 400;\"><span style=\"font-weight: 400;\">Tire pressure monitoring systems (TPMS)<\/span><\/li>\n<li style=\"font-weight: 400;\"><span style=\"font-weight: 400;\">Inertial measurement units (IMUs) for advanced driver assistance systems (ADAS) and autonomous vehicles<\/span><\/li>\n<\/ul>\n<h2><span style=\"font-weight: 400;\">Conclusion<\/span><\/h2>\n<p><span style=\"font-weight: 400;\">MEMS technology continues to permeate across multiple industries, including optics and photonics, biotechnology, and more. Researchers are taking advantage of the attractive features of MEMS devices, integrating them into more compact and portable devices than ever before. Since these devices are still emerging and undergoing significant research, proper testing and characterization are critical in order to identify how we can improve them.<\/span><\/p>\n<p><span style=\"font-weight: 400;\">Modern, software-defined instruments provide a fast, flexible solution for MEMS testing. For example, researchers at Oregon State University are using the Moku platform to design a low-noise system containing an end-to-end prototype in a single device. To learn more, check out our <\/span><a href=\"https:\/\/liquidinstruments.com\/blog\/2023\/03\/31\/accelerating-microelectromechanical-systems-mems-design-moku-go\/\" rel=\"noopener\"><span style=\"font-weight: 400;\">case study<\/span><\/a><span style=\"font-weight: 400;\">.<\/span><\/p>\n<h2><span style=\"font-weight: 400;\">Questions?<\/span><\/h2>\n<h4><b>Get answers to FAQs in our Knowledge Base<\/b><\/h4>\n<p><span style=\"font-weight: 400;\">If you have a question about a device feature or instrument function, check out our extensive <\/span><a href=\"https:\/\/knowledge.liquidinstruments.com\/\" rel=\"noopener\"><span style=\"font-weight: 400;\">Knowledge Base<\/span><\/a><span style=\"font-weight: 400;\"> to find the answers you\u2019re looking for. You can also quickly see popular articles and refine your search by product or topic.<\/span><\/p>\n<h4><b>Join our User Forum to stay connected<\/b><\/h4>\n<p><span style=\"font-weight: 400;\">Want to request a new feature? Have a support tip to share? From use case examples to new feature announcements and more, the <\/span><a href=\"https:\/\/forum.liquidinstruments.com\/\" rel=\"noopener\"><span style=\"font-weight: 400;\">User Forum<\/span><\/a><span style=\"font-weight: 400;\"> is your one-stop shop for product updates, as well as connection to Liquid Instruments and our global user community.<\/span><\/p>\n<div class=\"csl-left-margin\">[1]&nbsp;\u201cMEMS Sensors: A Comprehensive Guide,\u201d&nbsp;<i>ES Systems<\/i>, Jul. 14, 2023. https:\/\/esenssys.com\/comprehensive-guide-to-mems-sensors\/#:~:text=MEMS%20sensors%20are%20miniature%20devices<\/div>\n<div>\n<p>[2] Chircov, Cristina, and Alexandru Mihai Grumezescu. \u201cMicroelectromechanical Systems (MEMS) for Biomedical Applications.\u201d <i>Micromachines<\/i>, vol. 13, no. 2, 22 Jan. 2022, p. 164, https:\/\/doi.org\/10.3390\/mi13020164.<\/p>\n<\/div>\n<p>[3]&nbsp;\u201cMEMS automotive sensors drive the future of mobility,\u201d&nbsp;<i>Atomica<\/i>, Jul. 29, 2020. https:\/\/atomica.com\/mems-automotive-sensors-drive-the-future-of-mobility\/#:~:text=These%20sensors%20are%20the%20dominant<\/p>\n<p>&nbsp;<\/p>\n<p>&nbsp;<\/p>\n<p>\u200c<\/p>\n","protected":false,"gt_translate_keys":[{"key":"rendered","format":"html"}]},"excerpt":{"rendered":"<p>Everywhere you look, it\u2019s obvious: Devices today are getting smaller. What you may not realize is how small they\u2019re truly becoming. Enter microelectromechanical systems (MEMS). MEMS are tiny devices or systems with both electrical and mechanical components. These systems range from a few micrometers to a few millimeters in size. At these scales, there is [&hellip;]<\/p>\n","protected":false,"gt_translate_keys":[{"key":"rendered","format":"html"}]},"author":40,"featured_media":15834,"comment_status":"closed","ping_status":"closed","sticky":false,"template":"","format":"standard","meta":{"_acf_changed":false,"content-type":"","footnotes":""},"categories":[3],"tags":[241,242,244,313,243,312],"class_list":["post-15833","post","type-post","status-publish","format-standard","has-post-thumbnail","hentry","category-blog","tag-mems","tag-mems-characterization","tag-mems-testing","tag-memstesting","tag-microelectromechanical-systems","tag-semiconductortest","site-category-arbitrary-waveform-generator","site-category-digital-filter-box","site-category-frequency-response-analyzer","site-category-lock-in-amplifier","site-category-mokugo","site-category-mokulab","site-category-mokupro","site-category-multi-instrument-mode","site-category-oscilloscpe","site-category-pid-controller","site-category-spectrum-analyzer","site-category-waveform-generator"],"acf":[],"yoast_head":"<!-- This site is optimized with the Yoast SEO Premium plugin v27.0 (Yoast SEO v27.0) - https:\/\/yoast.com\/product\/yoast-seo-premium-wordpress\/ -->\n<title>MEMs Characterization 101 | Liquid Instruments<\/title>\n<meta name=\"description\" content=\"Microelectromechanical systems (MEMs) are already a big part of technology. 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